JPH0460542U - - Google Patents

Info

Publication number
JPH0460542U
JPH0460542U JP10162890U JP10162890U JPH0460542U JP H0460542 U JPH0460542 U JP H0460542U JP 10162890 U JP10162890 U JP 10162890U JP 10162890 U JP10162890 U JP 10162890U JP H0460542 U JPH0460542 U JP H0460542U
Authority
JP
Japan
Prior art keywords
plasma
plasma processing
vacuum
kept
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10162890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10162890U priority Critical patent/JPH0460542U/ja
Publication of JPH0460542U publication Critical patent/JPH0460542U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
JP10162890U 1990-09-29 1990-09-29 Pending JPH0460542U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10162890U JPH0460542U (en]) 1990-09-29 1990-09-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10162890U JPH0460542U (en]) 1990-09-29 1990-09-29

Publications (1)

Publication Number Publication Date
JPH0460542U true JPH0460542U (en]) 1992-05-25

Family

ID=31845253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10162890U Pending JPH0460542U (en]) 1990-09-29 1990-09-29

Country Status (1)

Country Link
JP (1) JPH0460542U (en])

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